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Domestic high-end photoresist mass production!
Source: | Author:佚名 | Published time: 2023-03-15 | 100 Views | Share:

        According to reports, domestic semiconductor material supplier Jingrui Electric Materials said that some varieties of KrF high-end photoresist have been mass produced!

         

       According to the introduction of Jingrui Electric Materials, the subsidiary Ruihong (Suzhou) Electronic Chemicals Co., Ltd., relying on its strong R&D strength and outstanding product advantages, has obtained the certification of downstream customers, developed and maintained a large number of high-quality customers at home and abroad, built a high-quality business platform, and successfully entered the supply chain of excellent customers.

        As an important link in the chip industry chain, photoresist is a mixed liquid photosensitive material composed of resin, photosensitive agent, solvent, photoinitiator, etc. The principle is to use a photochemical reaction to transfer the desired fine patterns onto the processing substrate through a photolithography process to achieve the goal of etching the desired patterns on the wafer. If a lithography machine is understood as a film camera, the film it uses is photoresist.

        According to different exposure wavelengths, photoresists can be divided into g-line, i-line, KrF, ArF, and EUV types. KrF, EUV, and ArF photoresists are mainly used in integrated circuits and belong to high-end photoresists. As an indispensable and important raw material in chip production, photoresist is also known as the "pearl in the crown of semiconductor materials.".

        An investor asked on the investor interaction platform whether the resolution of the company's KrF (248 nm deep ultraviolet) photoresist product has reached 0.25 to 0.13 μ Technical requirements for m? And passed some key customer tests?

        On March 13, Jingrui Electric Materials stated on the investor interaction platform that the resolution of its subsidiary Ruihong (Suzhou) Electronic Chemicals Co., Ltd. KrF photoresist products reached 0.25 to 0.13 μ The technical requirements of KrF have been tested by some important customers, and some varieties of KrF high-end photoresist have been mass produced.


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